JPS6280324U - - Google Patents
Info
- Publication number
- JPS6280324U JPS6280324U JP17241185U JP17241185U JPS6280324U JP S6280324 U JPS6280324 U JP S6280324U JP 17241185 U JP17241185 U JP 17241185U JP 17241185 U JP17241185 U JP 17241185U JP S6280324 U JPS6280324 U JP S6280324U
- Authority
- JP
- Japan
- Prior art keywords
- cluster
- ion beam
- substrate
- axis
- cluster ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17241185U JPS6280324U (en]) | 1985-11-09 | 1985-11-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17241185U JPS6280324U (en]) | 1985-11-09 | 1985-11-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6280324U true JPS6280324U (en]) | 1987-05-22 |
Family
ID=31108920
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17241185U Pending JPS6280324U (en]) | 1985-11-09 | 1985-11-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280324U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0286824A (ja) * | 1988-06-21 | 1990-03-27 | Anelva Corp | 真空蒸着装置 |
-
1985
- 1985-11-09 JP JP17241185U patent/JPS6280324U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0286824A (ja) * | 1988-06-21 | 1990-03-27 | Anelva Corp | 真空蒸着装置 |